Journal of Biomedical Research and Reviews

Abstract

This study addresses issues specifically related to the underwater dynamic actuation of #Micro Electro Mechanical Systems (MEMS), such as micro-cantilevers or comb-drive #microstructures. As a practical application, cantilevers made using MUMPs (Multi-User MEMS Processes) foundry are considered. Since the gap between the cantilevers and the underlying surface is very narrow (about 2 μm), water does not always flow easily underneath the cantilevers, especially when the surface is hydrophobic with respect to the liquid environment. As long as the MEMS surface is #hydrophobic, the lower the gap, the higher the pressure required to flow into micro-channels or gaps .As a consequence, this issue significantly modifies cantilevers’ performances. To gain an insight of the phenomenon, a new measurement technique was developed, referred to as MFTEC (MEMS Freezing by Thermo Electric Cooling), which can verify the presence of water under cantilevers or other micro-devices.

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A Technique for Detecting the Presence of Water Under micro-Devices working in a #LiquidEnvironment by Orfeo Sbaizero in BJSTR