Abstract
This study addresses issues specifically related to the underwater
dynamic actuation of #Micro Electro Mechanical Systems (MEMS), such
as micro-cantilevers or comb-drive #microstructures. As a practical
application, cantilevers made using MUMPs (Multi-User MEMS Processes)
foundry are considered. Since the gap between the cantilevers and the
underlying surface is very narrow (about 2 μm), water does not always
flow easily underneath the cantilevers, especially when the surface is
hydrophobic with respect to the liquid environment. As long as the MEMS
surface is #hydrophobic, the lower the gap, the higher the pressure
required to flow into micro-channels or gaps .As a consequence, this
issue
significantly modifies cantilevers’ performances. To gain an insight of
the phenomenon, a new measurement technique was developed, referred
to as MFTEC (MEMS Freezing by Thermo Electric Cooling), which can verify
the presence of water under cantilevers or other micro-devices.
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